Ion source: JYFL 14 GHz ECRIS
Method: The beam was produced with the MIVOC method using natRu(C5H5)2 compound (23.1.2001).
Materials:
Mixing gas: Oxygen was used as a mixing gas.
Microwave power: 630 W
Extraction voltage: 10 kV
Material consumption: N/A
CS | I (uA) |
---|---|
16+ | 5.3 |
17+ | |
18+ | 9.1 |
19+ | |
20+ | 5.1 |
21+ | |