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The beam was produced by using XXX the JYFL 14 GHz ECRIS. The ion source was tuned for.
Mixing gas: no mixing gas
Microwave power: 500 W
Acceleration voltage: kV 10 kV (extraction system)
Material consumption: N/A
Note: We have never really focussed on nitrogen ion beams. The beam was produced by letting air flow into the ion source through dosing valve.
| 3+ | |
|---|---|
| 4+ | 167 |
| 5+ | 225 |
| 6+ | 105 |