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| Volume of plasma chamber | 3.1 litres |
|---|---|
| Plasma volume | 00.36 litres |
Microwave frequency | 18/14 GHz |
| Typical max. microwave power | 2000/400 W |
Typical max. acceleration voltage | 20 kV |
| Base vacuum | 8e-8 mbar |
| BECR | 0.64 T |
BINJ | 2.8 T |
| BEXT | 1.3 T |
| BRAD | 1.3 T |
| BMIN | 0.44 T |
| Hexapole temperature | -20 - +15˚C |
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