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Mixing gas: Helium
Bias: -146V141V, -2.2 4 mA
Microwave power: 0.68kW 97kW 14 Ghz , 0.46kW 265kW 11.848Ghz837Ghz
Acceleration voltage: 23 kV, 4.1 3 mA
Material consumption: NA
| 3+ | |
|---|---|
| 4+ | |
| 5+ | 480 |
| 6+ | 660 705 |
| 7+ | 120 123 |
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