Ion source: JYFL 14 GHz ECRIS
Method: MIVOC
Compound: Titanium tetrachloride (TiCl4)
Preparation: TiCl4 is a volatile liquid, which reacts strongly with humid air producing thick clouds of titanium dioxide (TiO2) and hydrochloric acid (HCl). Thus, all handling the of TiCl4 was performed inside a glove box. The TiCl4 liquid was placed in a glass cup, which was housed inside a closed metal container. The container was connected to the ion source through a precision valve.
Safety: TiCl4 is a hazardous compound, so proper safety precautions are necessary when handling it. The hazards include, but are not limited to, the release of hydrochloric acid (HCl) when it reacts with water, which is severely corrosive and irritating. See the material safety datasheet for more information.
Mixing gas: O2
Microwave power: 150 W
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