The beam was produced by using XXX ECRIS. The ion source was tuned for.with the 14.5 GHz CAPRICE ECRIS equipped with a 1.0 T Permanent Magnets Hexapole.
Mixing gas: O2
Microwave power: W53W
Acceleration voltage: kV 15 kV (extraction system)
Material consumption:
Note:
| 3+ | |||
|---|---|---|---|
| 4+ | |||
| 5+ | |||
| 6+ | 7+ |