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| Volume of plasma chamber | 1.3 litres |
|---|---|
| Plasma volume | 0.17 15 litres |
Microwave frequency | 14.1 GHz |
| Typical max. microwave power | 1000 W |
Typical max. acceleration voltage | 16 kV |
| Base vacuum | 9e-8 mbar |
| BECR | 0.49 T |
BINJ | 2.2 T |
| BEXT | 0.9 T |
| BRAD | 1.05 T |
| BMIN | 0.4 T |
...