Ion source: JYFL 14 GHz ECRIS
Method:
Materials:
Mixing gas:
Microwave power:
Extraction voltage:
Material consumption:
CS | I (uA) |
---|---|
Ion source: JYFL 14 GHz ECRIS
Method:
Materials:
Mixing gas:
Microwave power:
Extraction voltage:
Material consumption:
CS | I (uA) |
---|---|