The beam was produced by using XXX using Atomki ECRIS. The ion source was tuned for Si 1+, 3+, 5+, 7+.
Mixing gas: Silane
Microwave power: W 30 - 500 W
Acceleration voltage: kV 10 kV (Atomki extraction system)
Material consumption:
Note:
| 1+ | 66 |
|---|---|
| 2+ | 43 |
| 3+ | 53 |
| 4+ | 81 |
| 5+ | 102 |
| 6+ | 89 |
| 7+ | 85 |
| 8+ | |
| 9+ | |
| 11+ | |
| 12+ | 26 |