Silicon at ATOMKI

Owned by Hannu Koivisto
Last updated: Jan 30, 2017 by Richard Racz

The beam was produced by using Atomki ECRIS. The ion source was tuned for Si 1+, 3+, 5+, 7+.

Main gas: Silane

Microwave power:  30 - 500 W

Acceleration voltage: 10 kV  (Atomki extraction system)

 

1+66
2+43
3+53
4+81
5+102
6+89
7+85
8+26