- Cut view
View file name 5p8.tif height 250 Main parameters
Volume of plasma chamber 0.12 litres Plasma volume (ECR closed volume) 0.011litres Microwave frequency 5.8 GHz Typical max. microwave power
100 W Typical max. acceleration voltage
40 kV Base vacuum 1e-6 mbar BECR 0.207 T BINJ 0.50 T BEXT 0.33 T BRAD 0.51 T BMIN 0.147 T
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