5.8 GHz ECR ion source
- ANGOT
Owned by ANGOT
- Cut view
Main parameters
Volume of plasma chamber 0.12 litres Plasma volume (ECR closed volume) 0.011litres Microwave frequency 5.8 GHz Typical max. microwave power
100 W Typical max. acceleration voltage
40 kV Base vacuum 1e-6 mbar BECR 0.207 T BINJ 0.50 T BEXT 0.33 T BRAD 0.51 T BMIN 0.147 T