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    name5p8.tif
    height250
  • Main parameters

    Volume of plasma chamber0.12 litres
    Plasma volume (ECR closed volume)0.011litres
    Microwave frequency5.8 GHz

    Typical max. microwave power

    100 W

    Typical max. acceleration voltage

    40 kV
    Base vacuum1e-6 mbar
    BECR 0.207 T
    BINJ 0.50 T
    BEXT0.33 T
    BRAD0.51 T
    BMIN0.147 T