Cross section of the ECR4 Ion Source (oven configuration):
...
- 1) Caracteristics
- 2) Gaz Configuration
- 3) Oven Configuration
- 4) Sputtering Configuration
- 5) MIVOC Configuration
- 6) Injection View
1) Caracteristics :
2) GAZ Configuration :
3) OVEN Configuration :
4) SPUTTERING Configuration :
5) MIVOC Configuration :
6) Injection view :
