ECR4 - 14 GHz Ion Source

Owned by BARUE Christophe
Last updated: Oct 10, 2017
  • 1) Caracteristics
  • 2) Gaz Configuration
  • 3) Oven Configuration
  • 4) Sputtering Configuration
  • 5) MIVOC Configuration
  • 6) Injection View 

1) Caracteristics :


2) GAZ Configuration :


3) OVEN Configuration :


4) SPUTTERING Configuration :

5) MIVOC Configuration :
 

 

6) Injection view :

 

 

 

 

 

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