ECR4-14 GHZ :
The ion source is optimized on 40Ar9+ (black spectrum). This is a reference spectrum with 160 µA of Ar9+. After a plasma chamber replacement, the ion source is validated if the Ar9+ beam intensity is greater or equal to 120 µA. A record intensity of 245 µA has been reported on the graph below (red spectrum) although no clear conclusion could be made : much better distribution due to a magnesium wall coating effect, or due to the higher RF power injected into the plasma ?
