Skip to end of metadata
Go to start of metadata

You are viewing an old version of this page. View the current version.

Compare with Current View Page History

« Previous Version 4 Next »

ECR4-14 GHZ :

The ion source is optimized on 40Ar9+ (black spectrum). This is a reference spectrum with 160 µA of Ar9+. After a plasma chamber replacement, the ion source is validated if the Ar9+ beam intensity is beetween greater or equal to 120 µA.

 

 

 

 

 

 

  • No labels